Conductive member cavities

ABSTRACT

In some examples, a quad flat no lead (QFN) semiconductor package comprises a flip chip semiconductor die having a surface and circuitry formed in the surface; and a conductive pillar coupled to the semiconductor die surface. The conductive pillar has a distal end relative to the semiconductor die, the distal end having a cavity including a cavity floor and one or more cavity walls circumscribing the cavity floor. The one or more cavity walls are configured to contain solder.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. patent applicationSer. No. 17/219,768, filed on Mar. 31, 2021, the contents of which areherein incorporated by reference in its entirety.

BACKGROUND

Some semiconductor packaging process flows call for the deposition of asolder ball on a conductive member, such as a copper pillar. Forexample, some flip-chip packages include semiconductor dies coupled tocopper pillars, and the copper pillars couple to other components (e.g.,package leads) via solder members formed by subjecting a solder ball toa reflow process.

SUMMARY

In some examples, a quad flat no lead (QFN) semiconductor packagecomprises a flip chip semiconductor die having a surface and circuitryformed in the surface; and a conductive pillar coupled to thesemiconductor die surface. The conductive pillar has a distal endrelative to the semiconductor die, the distal end having a cavityincluding a cavity floor and one or more cavity walls circumscribing thecavity floor. The one or more cavity walls are configured to containsolder.

In some examples, a method comprises forming a conductive pillar on apolyimide layer and a redistribution layer; forming a cavity in theconductive pillar using a laser ablation technique, the cavity in asurface of the conductive pillar opposite the polyimide layer;depositing a solder ball in the cavity; and performing a reflow processon the solder ball.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a profile view of a semiconductor package in accordance withvarious examples.

FIG. 1B is a perspective view of a semiconductor package in accordancewith various examples.

FIG. 2A is a profile cross-sectional view of contents of a semiconductorpackage in accordance with various examples.

FIG. 2B is a perspective view of contents of a semiconductor package inaccordance with various examples.

FIG. 3A is a profile cross-sectional view of a conductive member inaccordance with various examples.

FIG. 3B is a top-down view of a conductive member in accordance withvarious examples.

FIG. 3C is a perspective view of a conductive member in accordance withvarious examples.

FIGS. 3D1-3D3 are a process flow of a technique for manufacturing asemiconductor package in accordance with various examples.

FIG. 4A is a profile cross-sectional view of a conductive member inaccordance with various examples.

FIG. 4B is a top-down view of a conductive member in accordance withvarious examples.

FIG. 4C is a perspective view of a conductive member in accordance withvarious examples.

FIGS. 4D1-4D3 are a process flow of a technique for manufacturing asemiconductor package in accordance with various examples.

FIG. 5A is a profile cross-sectional view of a solder ball beingdeposited into a cavity of a conductive member in accordance withvarious examples.

FIG. 5B is a top-down view of a solder ball positioned in a cavity of aconductive member in accordance with various examples.

FIG. 5C is a perspective view of a conductive member in accordance withvarious examples.

FIG. 6A is a profile cross-sectional view of a solder ball beingdeposited into a cavity of a conductive member in accordance withvarious examples.

FIG. 6B is a top-down view of a solder ball positioned in a cavity of aconductive member in accordance with various examples.

FIG. 6C is a perspective view of a conductive member in accordance withvarious examples.

FIG. 7A is a profile cross-sectional view of a conductive member inaccordance with various examples.

FIG. 7B is a top-down view of a conductive member in accordance withvarious examples.

FIG. 7C is a perspective view of a conductive member in accordance withvarious examples.

FIG. 8 is a flow diagram of a method for manufacturing the structures ofFIGS. 3A-3C.

FIG. 9 is a flow diagram of a method for manufacturing the structures ofFIGS. 4A-4C.

DETAILED DESCRIPTION

During manufacture, the deposition of a solder ball on a conductivemember can be problematic. In some cases, a top surface of theconductive member may be slanted to a degree that causes the solder ballto roll off of the conductive member. In some cases, movement of arobotic arm used in the semiconductor packaging process may cause theinadvertent displacement of the solder ball off of the conductivemember. In some cases, reflow processes introduce air flow in thevicinity of the conductive member that can cause the solder ball to rolloff of the conductive member.

Further, reflow may cause the solder to flow so far away from theconductive member that the reflowed solder contacts another conductivemember, or contacts solder connected to another conductive member, orcontacts another conductive component in the semiconductor package. Thisphenomenon may be referred to as “solder bridging.” Solder bridging mayresult in short circuits or other unintended consequences. Solderbridging cannot be mitigated by reducing the volume of solder used,because such volumes are determined by standardized manufacturingequipment and processes.

This disclosure describes various examples of a semiconductor package(e.g., a flip-chip package) that includes a conductive member having ashape and dimensions that prevent solder balls from rolling off of theconductive member and that mitigate solder bridging. In some examples,the conductive member is coupled to a semiconductor die surface. Theconductive member has a distal end relative to the semiconductor die.The distal end has a cavity including a cavity floor and one or morecavity walls circumscribing the cavity floor. The one or more cavitywalls are configured to preclude a solder ball deposited on the cavityfloor from escaping the cavity. For example, the cavity walls may be ofa certain height relative to the cavity floor, and the cavity walls mayintersect with the cavity floor at right angles. Other dimensions, suchas the dimensions of the cavity in the horizontal plane, may besufficiently large to receive and hold a solder ball. Furthermore, asdescribed above, it is generally impractical to reduce the volume of asolder ball deposited during a semiconductor packaging process flow(e.g., due to standardized manufacturing techniques and equipment). Inexamples, however, when the solder ball is reflowed, the cavity storesat least some of the solder and the volume of solder flowing away fromthe conductive member is thus lessened. In this way, the risk of solderbridging is mitigated.

FIG. 1A is a profile view of a semiconductor package 100 in accordancewith various examples. The semiconductor package 100 contains aflip-chip semiconductor die (not expressly shown in FIG. 1A) coupled toconductive terminals 102. The semiconductor package 100 is shown as aquad flat no lead (QFN) package, but other types of packages, such asany package type that is able to accommodate flip-chip semiconductor dieconfigurations, are also contemplated and included in the scope of thisdisclosure. The semiconductor package 100 may include, for instance,leaded packages (e.g., dual inline packages), a ball grid array (BGA)package, etc. Although this disclosure describes various examples in thecontext of a QFN package, any and all package types, including packagesthat house flip-chip semiconductor dies, are contemplated and includedin the scope of this disclosure. The semiconductor package 100 includescavities in conductive members as described in greater detail below.FIG. 1B is a perspective view of the semiconductor package 100 inaccordance with various examples.

FIG. 2A is a profile cross-sectional view of contents of thesemiconductor package 100 in accordance with various examples. Thesemiconductor package 100 includes example conductive terminals 102 andan example flip-chip semiconductor die 104. By “flip-chip,” it is meantthat the semiconductor die 104 includes a device side 106 on and/or inwhich circuitry is formed and that this device side 106 faces downward,e.g., toward the conductive terminals 102. Insulative layers 108 (e.g.,polyimide layers) abut the device side 106. Conductive members 110 abutthe device side 106 and the insulative layers 108. In examples, theconductive members 110 include a metal. For instance, the conductivemembers 110 may be pillars (e.g., copper pillars). Solder members 112couple the conductive members 110 to the conductive terminals 102. Asshown, the conductive members 110 include cavities 114. The term“cavity” as used herein refers to a discontinuity in a particularmaterial even if the discontinuity is filled fully or in part by anothermaterial. In the example of FIG. 2A, solder members 112 fill thecavities 114, but the cavities 114 are still referred to as cavities.The solder members 112 abut the conductive members 110 and theconductive terminals 102. Thus, a conductive pathway is establishedbetween the circuitry on the device side 106 and the conductiveterminals 102 via the conductive members 110 and the solder members 112.Because the conductive terminals 102 are exposed to an exterior of thesemiconductor package 100, electronic devices outside the semiconductorpackage 100 may communicate with the semiconductor die 104 through theconductive pathway described above.

As shown, the cavities 114 store at least some of the solder members112. Given the application of a solder ball having a volume x to aconductive member having a cavity 114 and the application of a solderball having a volume x to a conductive member lacking a cavity 114, thesolder ball applied to the conductive member with the cavity 114 willresult in a lesser risk of solder bridging, because at least some of thesolder is contained in the cavity 114. Thus, the cavity 114 isresponsible for mitigating the risk of solder bridging. In the exampleof FIG. 2A, solder bridging is prevented between the two conductivemembers 110 because at least some of the solder members 112 are storedwithin the cavities 114. Further, the conductive members 110 areseparated by a distance 101, which is at least 30 microns, with adistance 101 less than 30 microns being disadvantageous at least becauseit promotes solder bridging. Solder bridging is further prevented atleast in part by the limited volume of the solder members 112, which mayrange from 17.9 kilomicrons (kum)³ to 33.5 kum³, with volumes below thisrange being disadvantageous at least because they result in inadequatesolder bond line thickness after die attach, causing suboptimal thermalcycling performance (but with reduced risk for solder cracking). Volumesabove this range are disadvantageous at least because they result inunacceptably thick solder bond line thickness, thus raising the risk forsolder cracks (but with improved thermal cycling). The volumes of thesolder members 112 and the distance 101 are together configured toprevent the first and second solder members from physically contactingeach other.

While FIG. 2A provides an example view of two conductive members 110 andtheir associated cavities 114, FIG. 2B provides a perspective view ofthe semiconductor die 104 and several conductive members 110 coupled tothe semiconductor die 104. FIG. 2B also shows solder members 112 coupledto the conductive members 110 and to conductive terminals 102.

FIG. 3A is a profile cross-sectional view of an example conductivemember 110 in accordance with various examples. The conductive member110 shown in FIG. 3A is representative of both of the conductive members110 shown in FIG. 2A and, more generally, of some or all of theconductive members 110 shown in FIG. 2B. The conductive member 110includes a proximal end 300 and a distal end 302, which are proximal anddistal, respectively, with respect to the semiconductor die 104 as shownin FIG. 2A. The proximal end 300 couples to the semiconductor die 104,such as to the device side 106. The distal end 302 includes the cavity114. The cavity 114 includes a cavity floor 304 that is circumscribed byone or more cavity walls 306. The cavity floor 304 may have any suitableshape in the horizontal plane, including a rectangle, a circle, anellipse, etc. The cavity walls 306 may be multiple separate walls, suchas when the cavity floor 304 has a rectangular shape in the horizontalplane, or a single cavity wall 306 may be used, such as when the cavityfloor 304 has a circular shape in the horizontal plane and the cavitywall 306 thus has a circular horizontal cross-section. The one or morecavity walls 306 include one or more surfaces 308 at the distal ends ofthe cavity walls 306, with each cavity wall 306 having its own surface308. The one or more surfaces 308 face a same direction 301 as thecavity floor 304. For example, in FIG. 3A, the cavity floor 304 and theone or more surfaces 308 face upward. In some examples, the one or moresurfaces 308 are positioned in a common horizontal plane 303. In someexamples, the cavity floor 304 is substantially parallel to a surface309 on the proximal end 300 of the conductive member 110. In examples,the one or more surfaces 308 are substantially parallel to the surface309. In some examples, the cavity floor 304 is substantially flat.

The cavity 114 may be formed by any suitable technique. In someexamples, the cavity 114 is formed using a laser ablation (e.g., asubtractive) technique. In some examples, the cavity 114 is formed usingphotolithography (e.g., an additive) technique. The cavity 114 shown inFIG. 3A is formed using an additive technique. Specifically, a mainportion 310 of the conductive member 110 is formed, and then aphotolithography technique may be used (e.g., using appropriatelypatterned masks) to additively form the cavity walls 306. In someexamples, a main portion 310 of the conductive member 110 is formed, andthen an additive manufacturing technique may be used to additively formthe cavity walls 306. In some examples, pick-and-place techniques may beused to couple cavity walls 306 to the main portion 310 using a suitableadhesive. In some examples, the cavity walls 306 are conductive. In someexamples, the cavity walls 306 are insulative.

An additively-applied cavity wall 306 may be identified at least byinspecting the grain boundary at the intersection 312 of the cavitywalls 306 and the main portion 310. In such cases, the grain boundary atthe intersection 312 may be mismatched, because the cavity walls 306 andthe main portion 310 are not formed from a monolithic block of material.An additively-applied cavity wall 306 may be identified by comparing thegrain boundaries that meet at the intersection 312 and identifying amismatch. An additively-applied cavity wall 306 may be identified bydetermining whether the material forming the cavity walls 306 is thesame as the material forming the main portion 310. An additively-appliedcavity wall 306 also may be identified by the angle 314 of theintersection 312 of the cavity wall 306 and the cavity floor 304, whichmay be substantially a right angle, but which may be curved (rounded) inthe case of a subtractively-formed (e.g., laser-ablated) cavity 114.FIG. 3B is a top-down view of the conductive member 110 in accordancewith various examples. FIG. 3C is a perspective view of the conductivemember 110 in accordance with various examples.

The dimensions of the main portion 310, the cavity walls 306, and thecavity 114 may be application-specific and may vary. The main portion310 has a maximum length 316 of 100 microns. Examples described hereinare less useful when a length 316 of the main portion 310 falls above100 microns, because the topography of the top layer of the conductivemember 110 follows the topography of the underlying layers of theconductive member 110, thus forming a conductive member 110 that isbetter able to retain a solder ball. Examples described herein areuseful when the length 316 falls below 100 microns, because thetopography of the top layer of the conductive member 110 does notproperly follow the topography of the underlying layers of theconductive member 110, and thus the conductive member 110 is not able toretain the solder ball without the benefit of the novel structuresdescribed herein. The main portion 310 has a maximum width 320 of 100microns. Examples described herein are less useful above this range forthe reasons described above with reference to length 316. The mainportion 310 has a height 318 of at least 30 microns. A height 318 of themain portion 310 that falls outside of this range is disadvantageous atleast because it is too thin relative to the depth of the cavity topermit adequate current flow therethrough. For this reason, the cavitydepth, described below, is no more than one third of the height 318.Each of the cavity walls 306 has a width 322 no larger than 30 microns.A width 322 of a cavity wall 306 outside of this range isdisadvantageous at least because the cavity 114 becomes too small tohold a solder ball. Each of the cavity walls 306 has a height 324 (andthus a cavity depth) ranging from 5 microns to 25 microns. A height 324of the cavity wall 306 greater than this range is disadvantageous atleast because it promotes solder voids between conductive members, thusresulting in diminished current flow. A height 324 less than this rangeis disadvantageous at least because it does not enable adequate soldercontrol due to an excessive amount of solder, thereby raising the riskof solder bridging. The lengths of the cavity walls 306 in thehorizontal plane are commensurate with the measurements (e.g., length316 and width 320) of the main portion 310 in the horizontal plane.

The cavity 114 has a length 326 ranging from 20 microns to 40 microns. Alength 326 of the cavity 114 outside of this range is disadvantageous atleast because the length is inadequate to provide a sufficiently largecavity 114 to control solder flow, or the length may be too large andvoiding becomes prominent and results in poor current flow. The cavity114 has a width 328 having the same range as the length 326, and thedisadvantages of having widths 328 outside of that range are the same asthe disadvantages of having lengths outside of the range for length 326as described above. The cavity 114 has a volume ranging from 3.6 kum³ to6.7 kum³, with a volume lower than this range being disadvantageous atleast because it results in a post-die attach solder bond line thicknessthat has poor thermal cycling performance, and with a volume higher thanthis range being disadvantageous at least because it degrades solderflow control and increases the risk of solder bridging. In addition, avolume higher than this range results in a higher risk for anunacceptably large bond line thickness and the attendant degradation inelectromigration performance. The angles 314 range from 75° to 95°. Anangle 314 outside of this range is disadvantageous at least because itnegatively affects the structural integrity of the conductive member110, for example, by causing the cavity walls 306 to buckle.

FIGS. 3D1-3D3 are a process flow illustrating the manufacture of thestructures of FIGS. 3A-3C. FIG. 8 is a flow diagram of a method 800 formanufacturing the structures of FIGS. 3A-3C. Accordingly, FIGS. 3D1-3D3and 8 are now described in parallel. The method 800 begins withproviding a redistribution layer (RDL) abutting a polyimide (PI) layer(802). FIG. 3D1 is a profile cross-sectional view of a portion of an RDL350 abutting a PI layer 352. The RDL 350 and PI layer 352 may be formedin any suitable manner and in any suitable configuration, depending onthe application. The method 800 includes forming a first under bumpmetallization (UBM) (804). FIG. 3D2 is a profile cross-sectional viewshowing the formation of the conductive member 110 on the PI layer 352and coupled to the RDL 350. In some examples, a photolithographytechnique is used, although other techniques are contemplated andincluded in the scope of this disclosure. The conductive member 110 isan example of the first UBM described in 804. The method 800 includesforming a second UBM to form a cavity on the top surface of the firstUBM (806). As described above, the second UBM may be formed using anysuitable technique, such as a photolithography technique. FIG. 3D3 is aprofile cross-sectional view showing the formation of the cavity 114 bythe formation of one or more cavity walls 306 via the second UBMprocess. The one or more cavity walls 306 are an example of the secondUBM described in 806. As described herein, the one or more cavity walls306 may have a circular cross-sectional shape and thus be a singlecavity wall 306, or the one or more cavity walls 306 may have apolygonal (e.g., rectangular) cross-sectional shape and thus includemultiple cavity walls 306. The method 800 includes dropping a solderball in the UBM cavity (808), which is described below with reference toFIGS. 5A and 5B. The method 800 includes performing a reflow process ofthe solder ball (810), which is described below with reference to FIG.5C.

FIG. 4A is a profile cross-sectional view of a conductive member 110 inaccordance with various examples. The example conductive member 110 ofFIG. 4A is identical to the example conductive member 110 of FIGS.3A-3C, except that the angles 314 of FIG. 3A are no longer present andare replaced by rounded corners where the cavity floor 304 meets thecavity walls 306. As described above, rounded corners may be presentwhen the cavity 114 is formed using a subtractive technique, and angularcorners (e.g., angles 314) may be present when the cavity 114 is formedusing an additive technique. Rounded corners have a curvature rangingfrom 1.3 to 1.8 radians per second, with a curvature falling below thisrange being disadvantageous at least because it substantially reducesthe ability to catch a solder ball, and a curvature falling above thisrange being disadvantageous at least because it substantially reducesthe ability to retain a solder ball. FIG. 4B is a top-down view of theconductive member 110 of FIG. 4A in accordance with various examples.FIG. 4C is a perspective view of the conductive member 110 of FIG. 4A inaccordance with various examples.

FIGS. 4D1-4D3 are a process flow illustrating the manufacture of thestructures of FIGS. 4A-4C. FIG. 9 is a flow diagram of a method 900 formanufacturing the structures of FIGS. 4A-4C. Accordingly, FIGS. 4D1-4D3and 9 are now described in parallel. The method 900 begins withproviding an RDL abutting a PI layer (902). FIG. 4D1 is a profilecross-sectional view showing a portion of an RDL 450 abutting a PI layer452. The method 900 includes forming a UBM (904). FIG. 4D2 is a profilecross-sectional view of a conductive member 110 abutting the PI layer452 and coupled to the RDL 450. The conductive member 110 is an exampleof the UBM of 904. The method 900 includes laser ablating a cavity inthe top surface of the UBM (906). Laser ablation is the process ofremoving material from a solid (e.g., the conductive member 110) byirradiating the solid with a laser beam. In examples, the laser ablationprocess may include the use of a Nd:YAG laser, with a strength in therange of 15-20 watts and a duration of 5-12 seconds, and with one ormore application iterations, as may be appropriate. FIG. 4D3 depicts theformation of the cavity 114 in the top surface of the conductive member110 by laser ablation. The cavity 114 includes one or more cavity walls306, as shown. The one or more cavity walls 306 may have any suitablecross-sectional shape, including circular, rectangular, etc. The method900 includes dropping a solder ball in the UBM cavity (908), asdescribed below with reference to FIGS. 6A and 6B, and performing areflow of the solder ball (910), as described below with reference toFIG. 6C.

FIGS. 5A-5C show the formation of the solder member connections of FIGS.2A and 2B. Specifically, FIG. 5A is a profile cross-sectional view of asolder member 112 being deposited into a cavity 114 of a conductivemember 110 in accordance with various examples. The solder member 112may be deposited into the cavity 114 by an electroplating or electrolessplating technique or a solder ball drop attach technique, for example.As shown, the solder member 112 at least partially fills the cavity 114.The solder member 112 abuts the one or more surfaces 308 of the multiplecavity walls 306. The solder member 112 abuts the one or more cavitywalls 306, such as the surfaces of the cavity walls 306 that face eachother. FIG. 5B is a top-down view of the solder member 112 positioned inthe cavity 114 of the conductive member 110 in accordance with variousexamples. FIG. 5C is a perspective view of the conductive member 110coupled to a conductive terminal 102 by way of the solder member 112, inaccordance with various examples. The solder member 112 transforms froma solder ball (e.g., FIGS. 5A and 5B) by way of a solder reflow process,for example.

FIGS. 6A-6C are identical to FIGS. 5A-5C respectively, except that thecavities 114 of the conductive members 110 shown in FIGS. 6A-6C includerounded corners, such as those described above with reference to FIGS.4A-4C.

The scope of this disclosure is not limited to conductive members of anyparticular shape. For example, FIGS. 7A-7C are profile cross-sectional,top-down, and perspective views of a cylindrical conductive member 700.The cylindrical conductive member 700 includes a main portion 710 and acavity wall 706. The cavity wall 706 circumscribes and defines a cavity750. The main portion 710 has a height 718. The height 718 has a rangeidentical to that of height 318 described above, and the disadvantagesof a height 718 that is above or below that range are the same as thedisadvantages of a height 318 above or below that range.

The main portion 710 has a diameter 716. The diameter 716 has a rangethat is identical to that of the length 316 described above. Thedisadvantages of a diameter 716 that is above or below that range arethe same as the disadvantages of a length 316 that is above or belowthat range.

The cavity 750 has a height (or cavity depth) 724. An angle 714 isformed where the cavity wall 706 meets a cavity floor 704. The angle 714has the same range as the angle 314, and the same disadvantages existwhen the angle 714 is outside that range as when the angle 314 isoutside that range.

FIG. 7B is a top-down view of the cylindrical conductive member 700. Asshown, the cavity 750 has a diameter 728. The diameter 728 has a rangethat is the same as that of the width 328. The disadvantages of adiameter 728 that is outside this range are the same as thedisadvantages of a width 328 that is outside this range. The cavity wall706 has a width 722 that has the same range as the width 322. Thedisadvantages of a width 722 that is outside this range are the same asthe disadvantages of a width 322 that is outside this range. FIG. 7C isa perspective view of the cylindrical conductive member 700.

In this description, the term “couple” may cover connections,communications, or signal paths that enable a functional relationshipconsistent with this description. For example, if device A provides asignal to control device B to perform an action, then: (a) in a firstexample, device A is coupled to device B; or (b) in a second example,device A is coupled to device B through intervening component C ifintervening component C does not substantially alter the functionalrelationship between device A and device B, such that device B iscontrolled by device A via the control signal provided or provided bydevice A.

While certain components may be described herein as being of aparticular process technology, these components may be exchanged forcomponents of other process technologies. Unless otherwise stated,“about”, “approximately”, or “substantially” preceding a value means+/−10 percent of the stated value. Modifications are possible in thedescribed examples, and other examples are possible, within the scope ofthe claims.

What is claimed is:
 1. A semiconductor package, comprising: asemiconductor die having a device side; a conductive pillar coupled tothe device side and having a distal end relative to the semiconductordie, the distal end including a cavity having a cavity floor that issubstantially flat and is circumscribed one or more cavity walls; and asolder member at least partially filling the cavity.
 2. Thesemiconductor package of claim 1, wherein the cavity has a volumeranging from 3.6 kum3 to 6.7 kum3.
 3. The semiconductor package of claim1, wherein the cavity has a depth ranging from 5 microns to 25 microns.4. The semiconductor package of claim 1, wherein the conductive pillarhas a footprint of a closed shape including circular and rectangularshapes.
 5. The semiconductor package of claim 1, wherein the one or morecavity walls include a closed shape including circular and rectangularshapes.
 6. The semiconductor package of claim 1, wherein the cavityfloor has a length or diameter ranging from 20 microns to 40 microns. 7.The semiconductor package of claim 1, wherein the cavity floor meets theone or more cavity walls at an angle ranging from 75° to 95°.
 8. Thesemiconductor package of claim 1, wherein an intersection of the cavityfloor and the one or more cavity walls includes a rounded corner.
 9. Asemiconductor package, comprising: a semiconductor die having a deviceside; a conductive pillar coupled to the device side, the conductivepillar including a main portion having a first side facing toward thedevice side and a wall portion on a second side of the main portionopposite the first side, wherein the wall portion circumscribe a centerportion of the second side creating a cavity on the second side; and asolder at least partially filling the cavity.
 10. The semiconductorpackage of claim 9, wherein the second side of the main portionuncovered by the wall portion is substantially flat.
 11. Thesemiconductor package of claim 9, wherein the conductive pillar has afootprint of a closed shape including circular and rectangular shapes.12. The semiconductor package of claim 9, wherein the center portionuncovered by wall portion has a length or diameter ranging from 20microns to 40 microns.
 13. The semiconductor package of claim 9,wherein: the main portion has a first height; and the wall portion has asecond height that is less than one third of the first height.
 14. Thesemiconductor package of claim 9, wherein the main portion has a heightof at least 30 microns.
 15. The semiconductor package of claim 9,wherein the wall portion has a height ranging from 5 microns to 25microns.
 16. The semiconductor package of claim 9, wherein the cavityhas a volume ranging from 3.6 kum3 to 6.7 kum3.
 17. The semiconductorpackage of claim 9, wherein the wall portion is insulative.
 18. Thesemiconductor package of claim 9, wherein: the main portion has a firstmaterial; and the wall portion has a second material different than thefirst material.
 19. The semiconductor package of claim 9, wherein themain portion and the wall portion have a same material.
 20. Thesemiconductor package of claim 9, wherein grain boundaries of the mainportion and the wall portion are mismatched at an interface between themain portion and the wall portion.
 21. The semiconductor package ofclaim 9, wherein the wall portion meets the main portion at an angleranging from 75° to 95°.
 22. The semiconductor package of claim 9,wherein an intersection of the main portion and the wall portionincludes a rounded corner.
 23. The semiconductor package of claim 22,wherein the rounded corner has a curvature ranging from 1.3 to 1.8radians per second.